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碳纳米管分散液和碳纳米管水泥基复合材料的制备方法

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成果归属企业: 深圳大学

成果鉴定时间:

成果介绍

本发明公开了一种低温沉积二氧化钒薄膜的方法，采用磁控溅射技术，以金属钒或钒合金为靶材，以氧气为反应气体，氩气为溅射气体；制备薄膜前，先将真空室抽至低于1×10‑3Pa本底真空，然后通入氧气和氩气混合气体，氧分压保持为0.01—0.06Pa，在沉积薄膜过程中，控制沉积温度为240～260℃，并在基底添加负偏压，靶表面溅射功率密度为2‑3W/cm2，在基底表面得到高性能的VO2薄膜。本发明的低温沉积方法将VO2薄膜的沉积温度低，并配合适当的负偏压及其他工艺参数制备出的薄膜均匀致密、二氧化钒相变温度低，具有良好相变性能的高性能VO2薄膜；大大降低了生产成本。

成果应用案例介绍

材料制品>膜材>低温沉积二氧化钒薄膜

联系方式

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