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高速制备高取向碳化硅

成果领域: 新材料

推广方式: 技术入股(股权合作)

成果归属企业: 华育昌（肇庆）智能科技研究有限公司

成果鉴定时间:1970-01-01

成果介绍

高取向碳化硅材料具有优秀的热稳定性、耐酸碱腐蚀性、导热性、中子吸收截面与力学性能，能够在极度条件下服役。该项目组已完成了科技部与国内外多家企业针对高取向碳化硅的研发任务，成功以目前国际上报道的最高速度（每小时 3600 微米）生产出直径 4 英寸、2 毫米厚度的高取向碳化硅晶圆与 50 毫米高取向碳化硅管材，实现了关键基础材料国产化。

成果应用案例介绍

高取向碳化硅具有的优异性能与在高新技术产业的巨大应用潜力。例如：高取向碳化硅是制造第三代半导体的金属有机源化学气相沉积装备中的重要内衬与支撑件材料。1 台设备 1 年就需要在碳化硅托盘上耗费 80 万元，我国每年仅在此单一工件上就耗费 160 亿元。此外，高取向碳化硅材料还在超高速涂层刀具、光学窗口、航空航天、核防护领域市场份额巨大，保守估计每年 2000 亿国内市场，500 亿海外市场。

联系方式

电话/微信: 13822630888

相关成果

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邮箱：zeccea@qq.com QQ群：318441538 客服电话：0758-2721389 秘书处电话/微信：13822630888

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